Abstract: The pollution characteristics of ground-level ozone was studied based on the O₃ concentration data of the national controlled points in Shanxi Province from 2018 to 2020, by analyzing the meteorological factors, including temperature, relative humidity, wind direction, wind speed, and its precursors (NO_x and VOCs) that affect the pollution characteristics of O₃ concentration. Source apportionment of regional and industrial transmission in Shanxi Province from June to August 2020 was performed by the CAMx model. The results showed that the O₃ pollution in Shanxi Province was mainly light pollution, and O₃ pollution became worse in Shanxi Province. The diurnal variation of O₃ showed a ‘single peak’ pattern, and the monthly variation occurred with geographical characteristics from May to September. ρ(O_{3-1 h}) was positively correlated with temperature and wind speed, but negatively correlated with relative humidity. High temperature and low humidity meteorological conditions were more likely to promote atmospheric O₃ formation. A piecewise linear relationship between wind speed and ρ(O_{3-1 h}) was observed. ρ(O_{3-1 h}) increased with the increase in wind speed. However, when the wind speed threshold was exceeded, ρ(O_{3-1 h}) decreased with the increase in wind speed. Taking Jincheng City as an example, high ρ(O_{3-1 h}) was more likely to occur when the temperature was higher than 25 ℃, the humidity was between 30%-60%, the wind speed was between 4-5 m/s and the wind direction was south and southeast. The results of the regional transport matrix of ground-level O₃ from June to August in 2020 showed that transport source had great influence on O₃ pollution, with a contribution rate of more than 80%, and the contribution of local sources was small. Similarly, during the simulation period, industrial sources including electric power, coking and other industrial sources contributed the most to the generation of O₃, accounting for about 50%, followed by diesel transportation sources, accounting for 20%-27%. This research shows that transport sources had great influence on O₃ pollution, and the regional joint prevention and control measures should be taken. It is proposed that controlling the emissions of VOCs from electric power, coking and diesel transportation would be more effective for reducing O₃ pollution.