Abstract: Life Cycle Assessment (LCA) was conducted to analyze the environmental impacts of solar grade polysilicon. A Chinese endpoint damage model of impact assessment was established based on Eco-Indicator99. The localization of the resource parameters of the impact assessment model was studied, and the localization criterion of resources depletion for China over the year 2007 was calculated to be 4.33×10⁵ MJ/(a·p). The data of mass and energy inputs, outputs and environmental emissions were obtained for all life-cycle stages by site investigation and questionnaire. The total product output of the samples accounted for 80% of the national production in 2012. It showed that from the viewpoint of environmental impacts, the damage to human health presented the greatest contribution to life cycle environmental impacts of solar grade polysilicon, accounting for 72.31% of the total environmental impacts. The second was depletion of resources (24.23%), while the damage to ecosystem quality was the least (3.46%). From the viewpoint of environmental factors, the electric power consumption was the highest of all, accounting for 79.48%, followed by steam consumption and MG(Metalurgical grade) silicon consumption, which accounted for 13.18% and 5.97%, respectively. Compared with the average level in Europe, the environmental impacts of solar grade polysilicon in China were more than twice that in Europe, which was caused by China's power structure. However, the level of technology and pollution control in China was better than that in Europe.